发明名称 TRANSFER DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a transfer device capable of reducing dust in the loading operation to reduce influences of the dust to a work by supporting the work in the nearly horizontal direction, and capable of restricting a concern that a glass substrate inside the work jumps out. Ž<P>SOLUTION: In the transfer device comprising an extension fork 1 and a lift device for lifting the fork 1, the fork 1 is curved into an upward circular shape so as to offset deflection of the fork 1 due to the weight of a work and to maintain the work W in the nearly horizontal direction in the loading/unloading operation. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010070284(A) 申请公布日期 2010.04.02
申请号 JP20080237352 申请日期 2008.09.17
申请人 HITACHI PLANT TECHNOLOGIES LTD 发明人 IZAWA YAMATO;ENDO YOSHINARI
分类号 B65G1/04;H01L21/677 主分类号 B65G1/04
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