| 摘要 |
PROBLEM TO BE SOLVED: To perform a grinding so that the inner peripheral end of an annular reinforcing portion does not become a rugged shape when forming the reinforcing portion with an outer peripheral margin area left on a backside of the wafer. SOLUTION: A truing means 14 which truing outer peripheral-side surfaces of grinding wheels 3c and 4c provided with grindstones 3b and 4b is provided, and the outer peripheral-side surfaces of grinding wheels 3c and 4c are properly trued by the truing means 14, whereby the outer peripheral-side surfaces of grinding wheels 3c and 4c can be kept perfectly round. COPYRIGHT: (C)2010,JPO&INPIT
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