| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of coping with high-frequency transmission. SOLUTION: The probe card includes a probe substrate provided with a signal probe 2 and a GND probe, and a main substrate 4, that is fixed to the probe substrate and is adapted to receive a signal from the outside. Each of the probes includes a bonding part 6 bonded to an electrode, an arm part 7 extending from the bonding part and a tip part 8 provided at the tip end of the arm part. The arm part is held by a support body provided on the probe substrate. The signal probe is so constituted that the arm part is provided with an outer insulation layer 10, that encloses the arm part from the bonding part to a portion held by the support body, and an air layer is provided between the arm part and the outer insulation layer. The outer insulation layer is covered with a thin-film conductor. GND conductors are bonded to the thin-film conductor covering the outer insulation layer, at two portions of the front end and the rear end, respectively. The GND conductor bonded to the front end, and the GND conductor bonded to the rear end are connected to a GND electrode. COPYRIGHT: (C)2010,JPO&INPIT |
