发明名称 METHOD FOR PRODUCING OXIDE SINTERED COMPACT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for effectively producing a sputtering target having a bulk resistance value low to a degree at which DC discharge is made possible. <P>SOLUTION: The method for producing an oxide sintered compact is characterized in that raw material powder comprising: a zinc compound containing a zinc atom and oxygen atom; and a tin compound containing a tin atom and oxygen atom is subjected to electrifying sintering in such a manner that DC pulse current is made to flow under pressure. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010070410(A) 申请公布日期 2010.04.02
申请号 JP20080238119 申请日期 2008.09.17
申请人 IDEMITSU KOSAN CO LTD 发明人 UTSUNO FUTOSHI;INOUE KAZUYOSHI
分类号 C04B35/453;C04B35/00;C04B35/64;H01B1/08;H01B13/00 主分类号 C04B35/453
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