| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a miniaturizable acceleration sensor element while maintaining sensitivity. <P>SOLUTION: The sensor element 20 is provided with: a weight unit 11 having a recessed part 11a; a frame-shaped fixing part 13 surrounding the weight unit 11; a beam 12 with one end connected to the fixing part 13 and the other end connected to the weight unit 11; a resistor element 15 arranged at the beam 12; and a weight member 22 that consists of a material with greater specific gravity than the material of the weight unit 11, buried in the recessed part 11a. <P>COPYRIGHT: (C)2010,JPO&INPIT |
