| 摘要 |
PROBLEM TO BE SOLVED: To obtain a head suspension flexibly responding to a request for reduction in size. SOLUTION: The head suspension includes a base plate 33, a load beam 35 on which a flexure 39 is provided, and an attachment part 33 to which a piezoelectric element 13 deformed in accordance with a voltage application state is fixed through an electrically insulated layer 51. A tip side of a load beam 33 is shifted to a sway direction according to deformation of the piezoelectric element 13. The electrically insulated layer 51 is formed at the attachment part 33 by depositing and polymerizing a polymer having an electric insulation property. COPYRIGHT: (C)2010,JPO&INPIT
|
