| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum valve controller capable of preventing a chattering phenomenon. SOLUTION: The vacuum valve controller 2 for opening and closing a vacuum value by a variation in the liquid level of liquid includes: a detection space 23 in which a detection diaphragm 22 elastically deformed by a pressure variation in a detection pipe for detecting the variation of the liquid level is arranged; a detection valve 25 opened and closed by the movement of a plunger 24, which is caused by the elastic deformation of the detection diaphragm 22; a switching space 27 in which a switching diaphragm 26 elastically deformed by vacuum pressure introduced by the opening/closing of the detection valve 25 is arranged; and a switching valve 28 which is moved according to the elastic deformation of the switching diaphragm 26 to selectively introduce the vacuum pressure or atmospheric pressure into the vacuum valve; wherein the detection space 23 and the switching space 27 are separated from each other without being connected to each other. COPYRIGHT: (C)2010,JPO&INPIT
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