| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce damage of an inspecting object by laser beam irradiation in a laser ultrasonic detector, and to measure the acoustic velocity of a longitudinal wave and transverse wave. Ž<P>SOLUTION: The laser ultrasonic detector 10c includes: a laser light source 11 for generating ultrasonic wave for irradiating the inspecting object with a pulse laser beam for generating ultrasonic wave to generate plate wave; a laser light source 12 for detecting ultrasonic wave for irradiating the inspecting object with a laser beam for detecting ultrasonic wave to detect the plate wave; a diffraction grating 14 for irradiating the surface of the inspecting object with diffracted light by diffracting the pulse laser beam for generating ultrasonic wave; a calculation section 61 for symmetrical-wave plate wave frequency to calculate the frequency of asymmetrical-wave plate wave by frequency-analyzing the plate wave generated by irradiation of the diffracted light; a calculation section 62 for symmetrical-wave plate wave frequency to calculate the frequency of symmetrical-wave plate wave by frequency-analyzing the plate wave generated by direct irradiation of the laser beam for generating ultrasonic wave; a calculation section 63 for transverse and longitudinal-wave acoustic velocity to calculate longitudinal wave acoustic velocity and transverse wave acoustic velocity corresponding to respective calculated values. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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