| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask fixture for vacuum film deposition whose surface is hard to be eroded, and which is not deformed and can be repeatedly used by cleaning. Ž<P>SOLUTION: The mask fixture for vacuum film deposition is arranged at the front face of a film deposition face when the material to be film-deposited is subjected to vacuum film deposition. The mask fixture for vacuum film deposition is composed of ferritic stainless steel covered with an iron based oxide film consisting essentially of Fe<SB>3</SB>O<SB>4</SB>. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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