发明名称 |
IMPRINTING APPARATUS AND METHOD THEREFOR |
摘要 |
<p>PURPOSE: It keeps abreast the resin coating process and imprint process and the imprinting apparatus and imprinting method enforce. Throughput is improved. CONSTITUTION: A coating apparatus(140) spreads resin in the top of the substrate. As to the surface and the side which is parallel of substrate, the first drive machinery(141) varies the relative position between substrate and the mold. As to the surface and the side which is parallel of substrate, the second driver tool(142) varies the relative position between substrate and the coating apparatus. It controls the coating apparatus and drive machinery and it keeps abreast the resin coating process and imprint process and controller enforces.</p> |
申请公布号 |
KR20100035107(A) |
申请公布日期 |
2010.04.02 |
申请号 |
KR20090087844 |
申请日期 |
2009.09.17 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KAWAKAMI EIGO;OKUSHIMA SHINGO;INA HIDEKI;SEKI JUNICHI;TERASAKI ATSUNORI;OKINAKA MOTOKI |
分类号 |
H01L21/02;B29C59/02;H01L21/027 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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