发明名称 COMPONENT PACKAGING APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a component packaging apparatus for rationalizing the arrangement of three stages, namely a component supply stage, a component relay stage, and a component packaging stage, and improving the efficiency of production by achieving efficient movement of a pickup head and a packaging head. <P>SOLUTION: The component packaging apparatus includes: the pickup head 5 for picking up a chip 4 from a wafer sheet holder 2; a chip relay table 6 for tentatively placing the picked chip 4; the packaging head 7 for receiving the chip 4 tentatively placed on the chip relay table 6; and a substrate support table 9 for packaging the chip 4 received by the packaging head 7 on a substrate 8. By disposing the chip relay table 6 so that it is at height between the wafer sheet holder 2 and the substrate support table 9, the travel time of the pickup head 5 and the packaging head 7 has been balanced. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010073924(A) 申请公布日期 2010.04.02
申请号 JP20080240464 申请日期 2008.09.19
申请人 PANASONIC CORP 发明人 NODA KAZUHIKO
分类号 H01L21/52;H01L21/50 主分类号 H01L21/52
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