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经营范围
发明名称
VERFAHREN ZUR HERSTELLUNG EINES HYBRIDSUBSTRATS
摘要
申请公布号
DE602007004879(D1)
申请公布日期
2010.04.01
申请号
DE20076004879T
申请日期
2007.11.28
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
MORICEAU, HUBERT;SARTORI, SYLVIE;CHARVET, ANNE-MARIE
分类号
H01L21/3105;H01L21/762
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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