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经营范围
发明名称
Elektronenstrahlgerät
摘要
申请公布号
DE69233781(D1)
申请公布日期
2010.04.01
申请号
DE19926033781
申请日期
1992.11.25
申请人
HITACHI LTD.;HITACHI SCIENCE SYSTEMS LTD.
发明人
OTAKA, TADASHI;OKURA, AKIMITSU;IWAMOTO, HIROSHI;TODOKORO, HIDEO;KOMODA, TSUTOMU;TOBITA, ISSEI
分类号
G01Q30/02;H01J37/28
主分类号
G01Q30/02
代理机构
代理人
主权项
地址
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