发明名称 METHOD FOR FORMING SELF-ALIGNED ELECTRODES
摘要 <p>The present invention is related to a method for forming a stack of at least two patterned layers comprising the steps of : providing a first layer transparent to visible light wavelengths, - forming, upon said first transparent layer, a first patterned layer, which is not transparent to said wavelengths, - forming, upon said first patterned layer and said first transparent layer, a second transparent layer, - depositing on said second transparent layer a precursor for forming an electrically conductive layer, - irradiating said precursor, through said first transparent layer and said second transparent layer, with visible light wavelengths for forming a second patterned layer, said first patterned layer acting as a mask.</p>
申请公布号 WO2010034815(A1) 申请公布日期 2010.04.01
申请号 WO2009EP62452 申请日期 2009.09.25
申请人 IMEC;NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK - TNO;STEUDEL, SOEREN 发明人 STEUDEL, SOEREN
分类号 H01L51/05 主分类号 H01L51/05
代理机构 代理人
主权项
地址