| 摘要 |
Provided are an optical module, an optical sensor using the optical module, and a method of manufacturing the optical module. The optical sensor includes: a semiconductor substrate having a plurality of optical paths; an optical glass substrate formed on the semiconductor substrate; a sample stage formed on the optical glass substrate; at least one sensor metal film formed on the sample stage, and sensing light by Surface Plasmon Resonance (SPR) to reflect the light at a pre-determined angle; a light source disposed on a lower surface of the semiconductor substrate, and emitting light having a specific wavelength toward one of the optical paths; a polarizing plate disposed between the semiconductor substrate and the light source, and polarizing the light emitted from the light source into transverse-magnetic light; a diffraction grating plate disposed between the semiconductor substrate and the optical glass substrate, and diffracting the polarized light at a specific angle to be incident on the sensor metal film; and at least one light receiver disposed on the lower surface of the semiconductor substrate, and detecting the light passed through at least one of the optical paths and reflected from the sensor metal film. According to the method, it is possible to manufacture an optical device having various functions.
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