MICROTUBE ARRAYS

摘要

An array of microtubes upwardly extending from a supporting base of substrate material is provided, in which the tubes comprise at least one concentric layer comprising a metallic oxide and at least one concentric layer comprising a piezoelectric and/or ferroelectric material. The array is made by lining the walls of pores in the substrate material sequentially with metallic oxide and piezoelectric and/or ferroelectric material and then removing part but not all of the substrate material. The arrays may be used in a variety of applications including liquid delivery and as microelectronic components. A method of generating terahertz emission is also provided.