发明名称 FLUOROPOLYMER THIN FILM AND METHOD FOR ITS PRODUCTION
摘要 To provide a method for producing a fluoropolymer excellent in adhesion to a substrate and film strength. A method for producing a fluoropolymer thin film, which comprises forming a fluoropolymer thin film on a substrate by a physical vapor deposition method using, as an evaporation source, a fluoropolymer having a fluorinated aliphatic ring structure in its main chain and having a weight average molecular weight of from 3,000 to 80,000.
申请公布号 US2010080903(A1) 申请公布日期 2010.04.01
申请号 US20090581220 申请日期 2009.10.19
申请人 ASAHI GLASS COMPANY LIMITED 发明人 TAMITSUJI CHIKAYA;WATANABE KUNIO;SAKANE YOSHIHIKO;MINAMIDATE JUN
分类号 C23C14/24 主分类号 C23C14/24
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