SENSOR AND METHOD FOR THE PRODUCTION OF A SENSOR

摘要

The invention relates to a sensor having a substrate, a cap and a seismic mass, wherein the substrate has a main extension plane, wherein the seismic mass is provided in a displaceable manner perpendicular to the main extension plane, wherein in a first coverage region a first stop of the cap covers a first region of the seismic mass perpendicular to the main extension plane, and wherein in a second coverage region a second stop of the cap covers a second region of the seismic mass perpendicular to the main extension plane, and wherein further the first and the second coverage regions parallel to the main extension plane are provided at substantially the same size. The distances of the coverage regions from a pivot axis of the mass configured as a rocker are the same such that the torques caused by electronic forces offset each other.