ACCELERATION SENSOR HAVING AN ELECTRODE BRIDGE

摘要

The invention relates to a capacitive micromechanical acceleration sensor comprising a substrate (10) and a micromechanical functional layer disposed over the substrate (10), wherein a seismic mass (20), a suspension (40), and fixed electrodes (30, 35) are disposed in the micromechanical functional layer. The fixed electrodes 30 or 35 are electrically connected to each other on a first or second side (110, 120) of the suspension (40) via buried conductor tracks (50, 55). The fixed electrodes (30, 35) are connected to each other between the first and second sides (110, 120) of the suspension (40) by means of first and second conductors (300, 350) in the micromechanical functional layer.