| 摘要 |
A piezoelectric element includes in a laminated state a piezoelectric layer, a first electrode formed on a first surface of the piezoelectric layer, and a second electrode formed on a second surface of the piezoelectric layer which is opposite to the first surface. The piezoelectric layer has a film thickness of 5 μm or less, and has a flat portion formed as a second surface in parallel with the first surface, and a lateral portion inclined downwardly from the flat portion towards the first surface. The second electrode has a central portion formed in parallel with the flat portion, and a slope portion inclined downwardly from the central portion towards the flat portion. The inclination angle of the slope portion to the flat portion is gentle as compared with the inclination angle of the lateral portion to the first surface. |
