发明名称 HEATING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR HEATING FLUID
摘要 In a heating unit, based on a required output amount Q, a control part 50 performs: (A) when the required output amount Q is not more than a predetermined set value, a control in which none of the heating devices 24a is continuously kept on throughout a heating cycle, and all or one or more heating devices 24a are controlled in a periodically divided manner; and (B) when the required output amount is larger than the predetermined set value, a control in which all or one or more heating devices 24a are continuously kept on throughout the heating cycle, and all or one or more heating devices 24a among the remaining heating devices 24a are controlled in the periodically divided manner during this heating cycle. At this time, a difference between the maximum number and the minimum number of the heating devices 24a that are simultaneously kept on during the heating cycle is made not more than 1.
申请公布号 US2010078423(A1) 申请公布日期 2010.04.01
申请号 US20090509725 申请日期 2009.07.27
申请人 TOKYO ELECTRON LIMITED 发明人 SATO HIDEAKI;HARA HIROMI
分类号 H05B1/02;F24D19/10;F24H9/20 主分类号 H05B1/02
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