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发明名称
Verfahren und Vorrichtung zur Übertragung von Mikro- oder Nanostrukturen durch Kontaktstempeln
摘要
申请公布号
DE112008001634(A5)
申请公布日期
2010.04.01
申请号
DE200811001634T
申请日期
2008.06.23
申请人
GESIM GESELLSCHAFT FUER SILIZIUM-MIKROSYSTEME MBH
发明人
HOWITZ, STEFFEN
分类号
G03F7/00;B41F17/00
主分类号
G03F7/00
代理机构
代理人
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