发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device, an image sensor, and methods of manufacturing the same. A semiconductor device may include metal interconnections formed over a lower substrate, a hard mask formed over metal interconnections, and/or an insulating layer formed over a surface of a lower substrate. A semiconductor device may include an insulating layer including an air gap formed between metal interconnections. An image sensor may include a pixel array area having photodiodes and transistors, and/or a logic area having a plurality of transistors, which may be formed over a semiconductor substrate. An image sensor may include a metal interconnection and/or an insulating layer structure connected to transistors, and may cover a pixel array area and/or a logic area. An image sensor may include a color filter layer formed over a pixel array area, and an insulating layer structure of a pixel array area having an air gap between metal interconnections.
申请公布号 US2010078746(A1) 申请公布日期 2010.04.01
申请号 US20090568820 申请日期 2009.09.29
申请人 JUNG OH-JIN 发明人 JUNG OH-JIN
分类号 H01L31/0232;B05D5/12;C23C16/513;C23F1/00;H01L31/00 主分类号 H01L31/0232
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