Air-supported object carrier positioning arrangement for measuring microscope, has control unit for reduction of air gaps defined by surfaces in coordinate direction while reaching target position up to contact of surfaces

摘要

The arrangement has air gaps defined by support surfaces, and actuating drives e.g. linear drives, for shifting an air-supported object carrier (1) from an actual position to a target position. Measuring devices e.g. laser interferometers, are provided for determination of the actual position, and a regulation device (12) corrects deviations between the actual and target positions. A control unit (11) is formed for reduction of the air gaps defined by the support surfaces in a coordinate direction (Z) while reaching the target position up to a contact of the support surfaces.