发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a transistor configuration including first and second gate electrodes, each of the first and second gate electrodes having at least a bottom layer and an upper layer including polycrystalline silicon grains, wherein the first gate electrode is a nMOS gate electrode formed in an nMOS region of the transistor configuration, wherein the polycrystalline silicon grains included in the bottom layer of the first gate electrode have a greater particle diameter than the polycrystalline grains included in the upper layer of the second gate electrode.
申请公布号 US2010078729(A1) 申请公布日期 2010.04.01
申请号 US20090567084 申请日期 2009.09.25
申请人 FUJITSU MICROELECTRONICS LIMITED 发明人 FUKUTOME HIDENOBU;OHTA HIROYUKI;TAJIMA MITSUGU
分类号 H01L27/088;H01L21/8238 主分类号 H01L27/088
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