Method for production of semiconductor layers, involves providing substrate and producing aerosol and liquid droplets, which are chemically combined with semiconductor material

摘要

The method involves providing a substrate (2) and producing aerosol and liquid droplets, which are chemically combined with semiconductor material. The liquid droplets are negatively ionized, where the droplets are ionized and accelerated in an electric field. The ion beam generates electric field and directs into the substrate. An independent claim is device for production of semiconductor layers on a substrate.