LASER ULTRASONIC INSPECTING METHOD USING THERMOELASTIC EFFECT OF LASER PULSE

摘要

PURPOSE: An ultrasonic laser inspecting method using the thermoelastic effect of a laser pulse beam is provided to measure an ultrasonic wave with high sensitivity by overlapping ultrasonic waves. CONSTITUTION: An ultrasonic laser inspecting method using the thermoelastic effect of a laser pulse beam is as follows. A plurality of laser pulse spots(2) arranged in an equilateral polygonal, circular, or ring form are irradiated to the surface of a sample(1) so that an ultrasonic wave is created in the sample through a thermoelastic effect. The ultrasonic wave is measured in the center of the equilateral polygon, circular, or ring form and the ultrasonic wave is overlapped at the measurement point.