| 摘要 |
Structure and method for fabricating a system on chip with an on-chip RF shield including interconnect metallization is described. In one embodiment, the system on chip includes an RF circuitry disposed on a first portion of a top surface of a substrate, and a semiconductor circuitry disposed on a second portion of the top surface of the substrate. An interconnect RF barrier is disposed between the RF circuitry and the semiconductor circuitry, the interconnect RF barrier coupled to a ground potential node.
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