METHOD OF OPTICAL PROXIMITY CORRECTION

摘要

PURPOSE: As the optical proximity compensation box only the constant area which the optical proximity compensation method includes changed data. The processing time to be required to the optical proximity compensation can be reduced. CONSTITUTION: A changed data is comparing the previous data with new data extracted(S1). The pattern region is selected in order to include the pattern of new data changed in previous data(S2). The selected pattern region as described above is compensated the optics nearing(S3). The new pattern changed among the new pattern compensated the optics nearing in previous data is selected(S4). The former pattern of domain corresponding to the new pattern changed in previous data is eliminated. The new pattern is merged(S5).