Method of and apparatus for surface heating a body by chemical reaction

摘要

A chemical reaction between a surface and a gaseous medium is produced when a surface is in an ionized gas plasma produced by a spark discharge within an evacuable enclosure. A surface of a Si semi-conductor is oxidized or nitrided in a moist O2 or N2 atmosphere; the surface may be wetted during the reaction. The substrate is mounted in a glass or quartz vessel containing a gas inlet and two electrodes, one of which is of the substrate material. The electrodes have large and small surface areas respectively. There may be several small electrodes connected in parallel. One electrode may be a nozzle through which the gas is introduced.