METHOD FOR MANUFACTURING OF ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE: A manufacturing method of an array panel for a liquid crystal display is provided to prevent a point defect by preventing a side etch through forming a silicon leach layer using a change of gas flow rate when forming a second passivation layer. CONSTITUTION: A manufacturing method of an array panel for a liquid crystal display comprises the following steps: forming a gate electrode(102) on a substrate(101); forming a gate insulating layer(104) in the front side of the substrate with the gate electrode; forming an active layer(105), an ohmic contact layer(106), a source electrode(107a) and a drain electrode(107b) on the gate insulating layer; forming a first passivation layer(108) in the front of the substrate including the source electrode and the drain electrode; plasma processing the surface of the first passivation layer; forming a color filter layer(109) on the first passivation layer; forming a second passivation layer(110); forming a contact hole(111) and forming a pixel electrode electrically connected with the drain electrode.