APPARATUS FOR DISPENSING GAS AND CHAMBER WITH THE SAME

摘要

PURPOSE: A gas distribution device and a chamber including the same are provided to maintain a gas distribution plate at a high temperature and insulate the gas distribution plate from the other components of the chamber by including a flexible suspension. CONSTITUTION: A plasma chamber includes a chamber wall(10), a gas distribution plate(20) and a suspension(24). The chamber wall includes one gas inlet manifold upper side or more. The gas distribution plate includes one gas outlet orifice or more. The suspension includes one gas inlet manifold sidewall with flexibility or more.