发明名称 CLEANING COMPOUND AND METHOD AND SYSTEM FOR USING THE CLEANING COMPOUND
摘要 A CLEANING COMPOUND IS PROVIDED. THE CLEANING COMPOUND INCLUDES ABOUT 0.1 WEIGHT PERCENT TO ABOUT 10 WEIGHT PERCENT OF A FATTY ACID DISPERSED IN WATER. THE CLEANING COMPOUND INCLUDES AN AMOUNT OF A BASE SUFFICIENT TO BRING A PH OF THE FATTY ACID WATER SOLUTION TO ABOUT A LEVEL WHERE ABOVE ABOUT 50% OF THE DISPERSED FATTY ACID IS IONIZED. A METHOD FOR CLEANING A SUBSTRATE, A SYSTEM FOR CLEANING A SUBSTRATE, AND A CLEANING SOLUTION PREPARED BY A PROCESS ARE ALSO PROVIDED.
申请公布号 MY141193(A) 申请公布日期 2010.03.31
申请号 MYPI20064606 申请日期 2006.11.30
申请人 LAM RESEARCH CORPORATION 发明人 ERIK M. FREER;JOHN M. DE LARIOS;KATRINA MIKHAYLINCHENKO;MICHAEL RAVKIN;MIKHAIL KOROLIK;FRED C. REDEKER
分类号 B08B3/02 主分类号 B08B3/02
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