发明名称 |
Metal wiring, method of forming the metal wiring, display substrate having the metal wiring and method of manufacturing the display substrate |
摘要 |
In a metal wiring, a method of forming the metal wiring, a display substrate having the metal wiring and a method of manufacturing the display substrate, the metal wiring includes a metal film and a first amorphous carbon film. The metal film is formed on a base substrate using a copper-containing material, and the first amorphous carbon film is formed beneath the metal film. A process for forming the metal wiring including the amorphous carbon film may be greatly simplified, and generation of defects in the metal wiring may be prevented or reduced.
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申请公布号 |
US7687805(B2) |
申请公布日期 |
2010.03.30 |
申请号 |
US20060609145 |
申请日期 |
2006.12.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD |
发明人 |
SHIM SEUNG-HWAN;KANG HO-MIN;MIN HOON-KEE;HONG SUNG-SU;PARK SUN;HEO SEONG-KWEON |
分类号 |
H01L27/14;H01L29/04;H01L29/15;H01L31/036 |
主分类号 |
H01L27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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