发明名称 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool
摘要 Method for manufacturing a mold tool (1), devised for forming a structured nanoscale pattern on an object (24) and having a layer (16) which is anti-adhesive with regard to the object (24). A stamp blank (2) is provided with a structured pattern (4) on a surface (8). The patterned surface (8) is coated with a layer (6) of a metal, which has a stable oxidation number and can form a mechanically stable oxide film. The metal layer (6) is oxidized for forming of an oxide film (10). The oxide film (10) is exposed to a reagent comprising molecule chains (18), each of which has a linkage group (20) which bonds to the oxide film (10) by chemical bonding, wherein the molecule chains (18) either at the outset comprise at least a group (22) comprising fluorine, or in a subsequent step is provided with at least one such group (22).
申请公布号 US7687007(B2) 申请公布日期 2010.03.30
申请号 US20040518475 申请日期 2004.12.20
申请人 OBDUCAT AB 发明人 LING TORBJOERN;MONTELIUS LARS;KEIL MATTHIAS;BECK MARC
分类号 B29C33/56;B29C33/42;B41M;B41M1/06;B81C1/00;G03F7/00;G11B5/855;H01L21/31;H01L21/469 主分类号 B29C33/56
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