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发明名称
CLEANING METHOD AND CLEANING APPARATUS
摘要
申请公布号
KR100950121(B1)
申请公布日期
2010.03.30
申请号
KR20060028775
申请日期
2006.03.30
申请人
发明人
分类号
H01L21/304;B08B3/08
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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