发明名称 Current-driven device using NiMn alloy and method of manufacture
摘要 A material for forming a conductive structure for a micromechanical current-driven device is described, which is an alloy containing about 0.025% manganese and the remainder nickel. Data shows that the alloy possesses advantageous mechanical and electrical properties. In particular, the sheet resistance of the alloy is actually lower and more stable than the sheet resistance of the pure metal. Accordingly, when used for conductive leads in a photonic device, the leads using the NiMn alloy may provide current to heat the photonic device while generating less heat within the leads themselves, and a more stable output.
申请公布号 US7687304(B2) 申请公布日期 2010.03.30
申请号 US20060605312 申请日期 2006.11.29
申请人 INNOVATIVE MICRO TECHNOLOGY 发明人 CARLSON GREGORY A.;PARANJPYE ALOK;SUMMERS JEFFERY F.;THOMPSON DOUGLAS L.
分类号 H01L21/00 主分类号 H01L21/00
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