发明名称 SOI circuit having reduced crosstalk interference and a method for forming the same
摘要 A method allowing the elimination of crosstalk interference, through the semiconductive substrate, between portions of a circuit provided on a same substrate comprising an upper semiconductive layer and an underlying dielectric layer, for instance an SOI wafer, wherein said portions are separated one from each other by forming trenches on said substrate either down to the dielectric layer or, in the case of an SOI substrate, down to the lower semiconductive layer.
申请公布号 US7687332(B2) 申请公布日期 2010.03.30
申请号 US20050099692 申请日期 2005.04.06
申请人 PIZZARULLI ANDREA 发明人 PIZZARULLI ANDREA
分类号 H01L21/00;H01L21/762;H01L21/84;H01L27/115;H01L27/12 主分类号 H01L21/00
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