| 发明名称 |
CLAMPING DEVICE AND OBJECT LOADING METHOD |
| 摘要 |
<p>The present invention relates to a c lamping device configured to clamp an object (20, 120) on a support (1, 101). The clamping device comprises: a first device configured to force the object and the support away from each other using a first force, and a second device configured to force the object and the support towards each other using a second force. The first device and second device are configured to simultaneously exert the first force and the second force respectively to shape the object to a desired shape before completing the clamping of the object on the support.</p> |
| 申请公布号 |
KR20100033515(A) |
申请公布日期 |
2010.03.30 |
| 申请号 |
KR20107001400 |
申请日期 |
2008.06.20 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
COMPEN RENE THEODORUS PETRUS;JACOBS JOHANNES HENRICUS WILHELMUS;LEENDERS MARTINUS HENDRIKUS ANTONIUS;OTTENS JOOST JEROEN;SMEETS MARTIN FRANS PIERRE |
| 分类号 |
H01L21/027;G03F7/20;H01L21/687 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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