发明名称 Method and device for measuring bond energy
摘要 The adhesion between two layers, in particular two thin layers of a microelectronic device, is a data item of importance. It was found that the closure ratio of the interface could be used, in non-destructive manner, to determine a measurement of bond energy. A method and a device using a magnitude characteristic of this length are described, in particular using low incidence X-ray reflection and electronic density at the interface.
申请公布号 US7688946(B2) 申请公布日期 2010.03.30
申请号 US20050666368 申请日期 2005.10.24
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 RIEUTORD FRANCOIS;MORICEAU HUBERT;BATAILLOU BENOIT
分类号 G01N23/20 主分类号 G01N23/20
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