发明名称 |
Assessment and optimization for metrology instrument |
摘要 |
Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation.
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申请公布号 |
US7688456(B2) |
申请公布日期 |
2010.03.30 |
申请号 |
US20080021356 |
申请日期 |
2008.01.29 |
申请人 |
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发明人 |
ARCHIE CHARLES N.;BANKE, JR. G. WILLIAM |
分类号 |
G01B11/14 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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