| 摘要 |
<p>PURPOSE: A substrate processing apparatus and this board feeding method are provided to implement the exchange preparation of a substrate by the mobile history of a carry-along element and processing unit at the same time. The waiting time for exchanging for substrate is reduced. CONSTITUTION: In the processing unit, a processing of substrate operates. In the processing unit, the processing of substrate is completed. The carry-along element moves to the processing unit. Simultaneously, the processing unit prepares the withdrawal of the processed substrate(S150). The carry-along element draws out the processed substrate from the processing unit(S160). The carry-along element transfers the drawn substrate to a receiving member.</p> |
