发明名称 METHOD AND DEVICE FOR MICRO-PATRERING OF PRINTING ROLL USING UV LASER IN LARGE-AREA
摘要 <p>PURPOSE: A fine pattern forming method and an UV laser scanning apparatus of a printing roll surface in other words directly form pattern is provided to simplify a manufacturing process using the hardening photosensitive film. CONSTITUTION: A photoresist is coated in the roll surface, a film is formed(S100). Here, photoresist is disassembled as hardening by the UV light. The photosensitive film is fixed with the soft baking(S200). The UV laser beam is scanned in the photosensitive film(S300). The photosensitive film of result is selectively removed through phenomenon(S400). The hard baking is enforced on the photosensitive film of result(S500).</p>
申请公布号 KR20100033223(A) 申请公布日期 2010.03.29
申请号 KR20080092291 申请日期 2008.09.19
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 YANG, MIN YANG;YOUN, HONG SEOK;KIM, SEONG BEOM;JEON, KANG MIN
分类号 H01L21/027 主分类号 H01L21/027
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