| 摘要 |
<p>PURPOSE: A vacuum processing device is that the heat transfer oil furnace of a heat transfer medium for the temperature control is formed in lid. The temperature deflection of the process space inside can be prevented. CONSTITUTION: A chamber body(22) is that the opening is formed in the upper side. A lid(24) forms the process space(20A) for the vacuum break with the chamber body. The shower head(40) is installed in lid. The gas is provided from outside and it dies of resentment on the process space. The lid forms the heat transfer oil(72) of the heating medium for the temperature control. The lid comprises the shower head receiving part(24A) which is concavely formed in order to insert the shower head.</p> |
