COLOR FILTER MANUFACTURING METHOD, COLOR FILTER, LIQUID CRYSTAL DISPLAY DEVICE AND MANUFACTURING APPARATUS

摘要

An etching stopper is prevented from being peeled. A color filter (10) is provided with an inorganic protection film (21) (etching stopper) having SnOas a main component. Since such inorganic protection film (21) has a high specific resistance and a linear expansion coefficient close to that of a transparent electrode (23), the inorganic protection film (21) does not peel from the transparent electrode (23) and a resin layer (22) even when a subject (19) to be processed is heated. As the inorganic protection film (21) and the transparent electrode (23) can be continuously formed inside the same film forming chamber (5), a time required for color filter manufacture is shortened compared with that required for conventional color filter manufacture.