DEGINE METHOD FOR DEPOSITION CONDITION OF CO-CU THIN FILM MULTILAYERS BY MOLECULAR DYNAMICS SIMULATION,申请号KR20070097750-传众专利搜索

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发明名称	DEGINE METHOD FOR DEPOSITION CONDITION OF CO-CU THIN FILM MULTILAYERS BY MOLECULAR DYNAMICS SIMULATION
摘要
申请公布号	KR100950213(B1)	申请公布日期	2010.03.29
申请号	KR20070097750	申请日期	2007.09.28
申请人		发明人
分类号	H01L21/20;H01L21/00	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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