METHOD AND APPARATUS FOR PRODUCTION OF FLUID-SHEAR AND MONODISPERSE ULTRA MICRO SOLDER BALL

摘要

PURPOSE: A method for manufacturing fluid-shear and monodisperse ultra micro solder balls and a manufacturing device thereof are provided to prevent surface oxidation of the fluid-shear and monodisperse ultra micro solder balls by drying ultra micro solder balls in a vacuum dry furnace. CONSTITUTION: The average particle diameter of ultra micro solder balls is 100μm or less. The average particle diameter of ultra micro solder balls is dispersed in a range of ±5μm. A thickness of a surface oxidation layer of the ultra micro solder balls is 5nm or less. The fused solder alloy penetrates a nozzle hole(4a). The solder alloy forms droplet(20).