PHOTOELECTRIC CONVERSION APPARATUS AND METHOD FOR MANUFACTURING THE SAME

摘要

This invention provides a photoelectric conversion apparatus, which can realize a stably high photoelectric conversion efficiency using a transparent electrode having an optimized relationship between electrical resistivity and transmittance, and a method for manufacturing the same. At least one of transparent electrodes (12, 16) is formed of a Ga-free ZnO layer or a Ga-added ZnO layer. The content of Ga in the ZnO layer is not more than 5 atomic% based on Zn in the ZnO layer. The ZnO layer is formed by a sputtering method using an oxygen-containing rare gas as a sputtering gas. The content of oxygen in the sputtering gas is not less than 0.1% by volume and not more than 5% by volume based on the total volume of the oxygen and rare gas.