METHOD OF MANUFACTURING SILICON SOLAR CELL SUBSTRATE FORMED CONCAVE AND CONVEX

摘要

PURPOSE: A silicon solar cell board manufacture method in which concavo-convex is formed optimally controls the rate of the gas used to the reactive ion etch process is provided so that the uniform concavo-convex is constituted in the substrate of monocrystal or the poly-si solar cell. CONSTITUTION: A silicon solar cell substrate(210) in which concavo-convex is formed is made of the reactive ion etching process. The gas used to the reactive ion etching process the chlorine(Cl2) gas, and the mixing gas of the sulfer hexafluoride(SF6) gas and oxygen(O2) gas. The ratio of the hydrochloric acid gas about the oxygen gas is instituted as the range of 2 to 0. The ratio of the sulfur hexafluoride gas about the oxygen gas is instituted as the range of 4 to 2. The ratio of the hydrochloric acid gas about the oxygen gas is instituted as the range of 2 to 0.