| 摘要 |
PURPOSE: A laser processing apparatus is provided to use the laser beam with a power suitable for a kind of target objects and a processing purpose by varying the output power of the laser beam through a wave plate and a polarizer. CONSTITUTION: A laser generator(107) outputs the laser beam of a predetermined power. An intensity controller(109) controls the power of the laser beam radiated from the laser generator. The galvano mirror scanner(111) is driven by a predetermined rotation angle and a rotation speed. The laser beam radiated from the intensity control part branches to a plurality of beams by the galvano mirror scanner. An optical system(113) radiates a focused laser beam to an object by respectively focusing the laser beam branched in the galvano mirror scanner. The intensity control part comprises a polarizer diversifying the quantity of light of the laser beam radiated from a wave plate and a wave plate rotating the polarization direction of the laser beam radiated from the laser generator. |
